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KAIST Institute For NANOCENTURY
Model | Mask Alinger(MDA-400M-06) |
---|---|
Specifications | UV Photolithography |
Manager/Contact | Lim, Ji Soo /limwakil@kaist.ac.kr / 042-350-2553 |
Usage fees | Internal : 30,000/1hr External : 40,000/1hr |