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KAIST Institute For NANOCENTURY

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2012.10.19 14:11

Rapid Thermal Annealing(RTA)

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Extra Form
Model Rapid Thermal Annealing(RTA)
Specifications Rapid thermal annealing system
Manager/Contact Sunghan Choi / csh3372@kaist.ac.kr / 042-350-7280
Usage fees Internal : 30,000/1Spectrum
External : 50,000/1Spectrum
Others : 50,000/1Spectrum

    RTA1000.jpg



  1. Rules for Cleanroom

  2. P-2 long scan profiler(Alpha step)

  3. E-beam writer with SEM (JSM-6510)

  4. DC Pt sputtering and dry etching

  5. Mask Alinger(MDA-400M-06)

  6. Glove box & Thermal evaporator

  7. DC/RF Magnetron Sputter

  8. Rapid Thermal Annealing(RTA)

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