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2012.10.19 14:42

DC/RF Magnetron Sputter

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Extra Form
Model DC/RF Magnetron Sputter
Specifications - Vacuum Pump : 2 Rotary pump (~1×10-4 torr), 1 Turbo Molecular pump (~1×10-6 torr)
- Power supply : 2DC, 1AC
- Gas supply : 2MFC (Ar, N2) / Target materials: Cu, Al
- Vacuum gauge : 2 low vacuum gauge, 1 ion gauge
Manager/Contact Oh, Jae Young / flyup2000@kaist.ac.kr / 042-350-3367
Usage fees Internal : 35,000/1hr
External : 100,000/1hr
Others : 50,000/1hr

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  1. Rules for Cleanroom

  2. P-2 long scan profiler(Alpha step)

  3. E-beam writer with SEM (JSM-6510)

  4. DC Pt sputtering and dry etching

  5. Mask Alinger(MDA-400M-06)

  6. Glove box & Thermal evaporator

  7. DC/RF Magnetron Sputter

  8. Rapid Thermal Annealing(RTA)

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