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KAIST Institute For NANOCENTURY
Model | DC/RF Magnetron Sputter |
---|---|
Specifications | - Vacuum Pump : 2 Rotary pump (~1×10-4 torr), 1 Turbo Molecular pump (~1×10-6 torr) - Power supply : 2DC, 1AC - Gas supply : 2MFC (Ar, N2) / Target materials: Cu, Al - Vacuum gauge : 2 low vacuum gauge, 1 ion gauge |
Manager/Contact | Oh, Jae Young / flyup2000@kaist.ac.kr / 042-350-3367 |
Usage fees | Internal : 35,000/1hr External : 100,000/1hr Others : 50,000/1hr |