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Instrument

KAIST Institute For NANOCENTURY

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Extra Form
Model Glove box & Thermal evaporator
Specifications - Cryo pump (10-7 torr)
- Metal source unit 2ea
- Thickness monitor (0.01nm)
Manager/Contact Oh, Jae Young / flyup2000@kaist.ac.kr / 042-350-3367
Usage fees Internal : 25,000/1day
External : 35,000/1day
Others : -

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  1. Rules for Cleanroom

  2. P-2 long scan profiler(Alpha step)

  3. E-beam writer with SEM (JSM-6510)

  4. DC Pt sputtering and dry etching

  5. Mask Alinger(MDA-400M-06)

  6. Glove box & Thermal evaporator

  7. DC/RF Magnetron Sputter

  8. Rapid Thermal Annealing(RTA)

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