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KAIST Institute For NANOCENTURY

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2012.10.19 14:42

Mask Alinger(MDA-400M-06)

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Extra Form
Model Mask Alinger(MDA-400M-06)
Specifications UV Photolithography
Manager/Contact Lim, Ji Soo /limwakil@kaist.ac.kr / 042-350-2553
Usage fees Internal : 30,000/1hr
External : 40,000/1hr

Mask aligner-2.jpg




  1. Rules for Cleanroom

  2. P-2 long scan profiler(Alpha step)

  3. E-beam writer with SEM (JSM-6510)

  4. DC Pt sputtering and dry etching

  5. Mask Alinger(MDA-400M-06)

  6. Glove box & Thermal evaporator

  7. DC/RF Magnetron Sputter

  8. Rapid Thermal Annealing(RTA)

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