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KAIST Institute For NANOCENTURY

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Model DC Pt sputtering and dry etching(self-manufacture)
Specifications Ar dry etching for surface cleaning and platinum deposition
Manager/Contact Lim, Ji Soo /limwakil@kaist.ac.kr / 042-350-2553
Usage fees - Dry etching
Internal : 20,000/20min(standard) + 10,000/10min
External : 30,000/20min(standard) + 15,000/10min
- Pt deposition
Internal : 80,000/100nm(standard) + 20,000/1min
External : 120,000/100nm(standard) + 30,000/1min
    Dc pt sputtering and dry etching.JPG




  1. Rules for Cleanroom

  2. P-2 long scan profiler(Alpha step)

  3. E-beam writer with SEM (JSM-6510)

  4. DC Pt sputtering and dry etching

  5. Mask Alinger(MDA-400M-06)

  6. Glove box & Thermal evaporator

  7. DC/RF Magnetron Sputter

  8. Rapid Thermal Annealing(RTA)

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