- INTRODUCTION
- Welcome Address
- Introduction
- Contact US
- PEOPLE
- Professor
- Researcher
- Staff
- RESEARCH HIGHLIGHTS
- Research highlight
- Achievement
KAIST Institute For NANOCENTURY
Model | E-beam writer with SEM (JSM-6510) |
---|---|
Specifications | Various nanopatterning is essential for studying electrical properties of 2 dimensional materials and carbon nanotube. E-beam writer is possible to fabricate electrical devices from nano size to macro size with various patterns. Also they can make line & space periodic patterns which give potentional to study optical properties of meta materials. - Surface morpology & topography analysis - E-beam lithography patterning for device fabrication |
Manager/Contact | Kim Joo Yub / jooyub.kim@kaist.ac.kr / 042-350-3382 |
Usage fees | Internal : 53,000/1hr External : - Others : - |