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KAIST Institute For NANOCENTURY

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Extra Form
Model TENCOR P-2 long scan profiler(Alpha step)
Specifications - Long scan profiler
- Scan length : max 60 mm
- Max trench depth : 440 μm
- Scan speed : max 100 s
Manager/Contact Kie Young Woo / kywoo9126@kaist.ac.kr / 042-350-7280
Usage fees Internal : 30,000/1hr
External : 50,000/1hr
Others : 50,000/1hr

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  1. Rules for Cleanroom

  2. P-2 long scan profiler(Alpha step)

  3. E-beam writer with SEM (JSM-6510)

  4. DC Pt sputtering and dry etching

  5. Mask Alinger(MDA-400M-06)

  6. Glove box & Thermal evaporator

  7. DC/RF Magnetron Sputter

  8. Rapid Thermal Annealing(RTA)

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