KAIST Institute For NANOCENTURY
Rules for Cleanroom
P-2 long scan profiler(Alpha step)
E-beam writer with SEM (JSM-6510)
DC Pt sputtering and dry etching
Mask Alinger(MDA-400M-06)
DC/RF Magnetron Sputter
Glove box & Thermal evaporator
Rapid Thermal Annealing(RTA)
