NEWS   For NanoCentury

Instrument

KAIST Institute For NANOCENTURY

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  1. Rules for Cleanroom

  2. DC Pt sputtering and dry etching

  3. DC/RF Magnetron Sputter

  4. E-beam writer with SEM (JSM-6510)

  5. Glove box & Thermal evaporator

  6. Mask Alinger(MDA-400M-06)

  7. P-2 long scan profiler(Alpha step)

  8. Rapid Thermal Annealing(RTA)

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