NEWS   For NanoCentury

Instrument

KAIST Institute For NANOCENTURY

  • >
  •    NEWS   
  • >
  • Instrument
2012.10.19 14:42

DC/RF Magnetron Sputter

-
Extra Form
Model DC/RF Magnetron Sputter
Specifications - Vacuum Pump : 2 Rotary pump (~1×10-4 torr), 1 Turbo Molecular pump (~1×10-6 torr)
- Power supply : 2DC, 1AC
- Gas supply : 2MFC (Ar, N2) / Target materials: Cu, Al
- Vacuum gauge : 2 low vacuum gauge, 1 ion gauge
Manager/Contact Oh, Jae Young / flyup2000@kaist.ac.kr / 042-350-3367
Usage fees Internal : 35,000/1hr
External : 100,000/1hr
Others : 50,000/1hr

3-1.jpg


Atachment
첨부 '2'
List of Articles
번호 제목 날짜
공지 Rules for Cleanroom file 2012.10.19
7 DC Pt sputtering and dry etching file 2012.10.19
» DC/RF Magnetron Sputter file 2012.10.19
5 E-beam writer with SEM (JSM-6510) file 2012.10.19
4 Glove box & Thermal evaporator file 2012.10.19
3 Mask Alinger(MDA-400M-06) file 2012.10.19
2 P-2 long scan profiler(Alpha step) file 2016.11.08
1 Rapid Thermal Annealing(RTA) file 2012.10.19
Board Pagination Prev 1 Next
/ 1