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KAIST Institute For NANOCENTURY
Model | DC/RF Magnetron Sputter |
---|---|
Specifications | - Vacuum Pump : 2 Rotary pump (~1×10-4 torr), 1 Turbo Molecular pump (~1×10-6 torr) - Power supply : 2DC, 1AC - Gas supply : 2MFC (Ar, N2) / Target materials: Cu, Al - Vacuum gauge : 2 low vacuum gauge, 1 ion gauge |
Manager/Contact | Oh, Jae Young / flyup2000@kaist.ac.kr / 042-350-3367 |
Usage fees | Internal : 35,000/1hr External : 100,000/1hr Others : 50,000/1hr |
번호 | 제목 | 날짜 |
---|---|---|
공지 |
Rules for Cleanroom
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2012.10.19 |
7 |
DC Pt sputtering and dry etching
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2012.10.19 |
» |
DC/RF Magnetron Sputter
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2012.10.19 |
5 |
E-beam writer with SEM (JSM-6510)
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2012.10.19 |
4 |
Glove box & Thermal evaporator
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2012.10.19 |
3 |
Mask Alinger(MDA-400M-06)
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2012.10.19 |
2 |
P-2 long scan profiler(Alpha step)
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2016.11.08 |
1 |
Rapid Thermal Annealing(RTA)
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2012.10.19 |