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KAIST Institute For NANOCENTURY

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Extra Form
Model Glove box & Thermal evaporator
Specifications - Cryo pump (10-7 torr)
- Metal source unit 2ea
- Thickness monitor (0.01nm)
Manager/Contact Oh, Jae Young / flyup2000@kaist.ac.kr / 042-350-3367
Usage fees Internal : 25,000/1day
External : 35,000/1day
Others : -

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List of Articles
번호 제목 날짜
공지 Rules for Cleanroom file 2012.10.19
7 Rapid Thermal Annealing(RTA) file 2012.10.19
6 P-2 long scan profiler(Alpha step) file 2016.11.08
5 Mask Alinger(MDA-400M-06) file 2012.10.19
» Glove box & Thermal evaporator file 2012.10.19
3 E-beam writer with SEM (JSM-6510) file 2012.10.19
2 DC/RF Magnetron Sputter file 2012.10.19
1 DC Pt sputtering and dry etching file 2012.10.19
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