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KAIST Institute For NANOCENTURY
Model | Mask Alinger(MDA-400M-06) |
---|---|
Specifications | UV Photolithography |
Manager/Contact | Lim, Ji Soo /limwakil@kaist.ac.kr / 042-350-2553 |
Usage fees | Internal : 30,000/1hr External : 40,000/1hr |
번호 | 제목 | 날짜 |
---|---|---|
공지 |
Rules for Cleanroom
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2012.10.19 |
7 |
P-2 long scan profiler(Alpha step)
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2016.11.08 |
6 |
E-beam writer with SEM (JSM-6510)
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2012.10.19 |
5 |
DC Pt sputtering and dry etching
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2012.10.19 |
» |
Mask Alinger(MDA-400M-06)
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2012.10.19 |
3 |
Glove box & Thermal evaporator
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2012.10.19 |
2 |
DC/RF Magnetron Sputter
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2012.10.19 |
1 |
Rapid Thermal Annealing(RTA)
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2012.10.19 |