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KAIST Institute For NANOCENTURY
Model | DC Pt sputtering and dry etching(self-manufacture) |
---|---|
Specifications | Ar dry etching for surface cleaning and platinum deposition |
Manager/Contact | Lim, Ji Soo /limwakil@kaist.ac.kr / 042-350-2553 |
Usage fees | - Dry etching Internal : 20,000/20min(standard) + 10,000/10min External : 30,000/20min(standard) + 15,000/10min - Pt deposition Internal : 80,000/100nm(standard) + 20,000/1min External : 120,000/100nm(standard) + 30,000/1min |
번호 | 제목 | 날짜 |
---|---|---|
공지 |
Rules for Cleanroom
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2012.10.19 |
» |
DC Pt sputtering and dry etching
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2012.10.19 |
6 |
DC/RF Magnetron Sputter
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2012.10.19 |
5 |
E-beam writer with SEM (JSM-6510)
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2012.10.19 |
4 |
Glove box & Thermal evaporator
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2012.10.19 |
3 |
Mask Alinger(MDA-400M-06)
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2012.10.19 |
2 |
P-2 long scan profiler(Alpha step)
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2016.11.08 |
1 |
Rapid Thermal Annealing(RTA)
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2012.10.19 |