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KAIST Institute For NANOCENTURY
Model | E-beam writer with SEM (JSM-6510) |
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Specifications | Various nanopatterning is essential for studying electrical properties of 2 dimensional materials and carbon nanotube. E-beam writer is possible to fabricate electrical devices from nano size to macro size with various patterns. Also they can make line & space periodic patterns which give potentional to study optical properties of meta materials. - Surface morpology & topography analysis - E-beam lithography patterning for device fabrication |
Manager/Contact | Kim Joo Yub / jooyub.kim@kaist.ac.kr / 042-350-3382 |
Usage fees | Internal : 53,000/1hr External : - Others : - |
번호 | 제목 | 날짜 |
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공지 |
Rules for Cleanroom
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2012.10.19 |
7 |
P-2 long scan profiler(Alpha step)
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2016.11.08 |
» |
E-beam writer with SEM (JSM-6510)
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2012.10.19 |
5 |
DC Pt sputtering and dry etching
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2012.10.19 |
4 |
Mask Alinger(MDA-400M-06)
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2012.10.19 |
3 |
DC/RF Magnetron Sputter
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2012.10.19 |
2 |
Glove box & Thermal evaporator
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2012.10.19 |
1 |
Rapid Thermal Annealing(RTA)
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2012.10.19 |