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KAIST Institute For NANOCENTURY

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Extra Form
Model E-beam writer with SEM (JSM-6510)
Specifications Various nanopatterning is essential for studying electrical properties of 2 dimensional materials and carbon nanotube. E-beam writer is possible to fabricate electrical devices from nano size to macro size with various patterns. Also they can make line & space periodic patterns which give potentional to study optical properties of meta materials.

- Surface morpology & topography analysis
- E-beam lithography patterning for device fabrication
Manager/Contact Kim Joo Yub / jooyub.kim@kaist.ac.kr / 042-350-3382
Usage fees Internal : 53,000/1hr
External : -
Others : -

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List of Articles
번호 제목 날짜
공지 Rules for Cleanroom file 2012.10.19
7 Rapid Thermal Annealing(RTA) file 2012.10.19
6 P-2 long scan profiler(Alpha step) file 2016.11.08
5 Mask Alinger(MDA-400M-06) file 2012.10.19
4 Glove box & Thermal evaporator file 2012.10.19
» E-beam writer with SEM (JSM-6510) file 2012.10.19
2 DC/RF Magnetron Sputter file 2012.10.19
1 DC Pt sputtering and dry etching file 2012.10.19
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