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KAIST Institute For NANOCENTURY
Model | TENCOR P-2 long scan profiler(Alpha step) |
---|---|
Specifications | - Long scan profiler - Scan length : max 60 mm - Max trench depth : 440 μm - Scan speed : max 100 s |
Manager/Contact | Kie Young Woo / kywoo9126@kaist.ac.kr / 042-350-7280 |
Usage fees | Internal : 30,000/1hr External : 50,000/1hr Others : 50,000/1hr |
번호 | 제목 | 날짜 |
---|---|---|
공지 |
Rules for Cleanroom
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2012.10.19 |
7 |
DC Pt sputtering and dry etching
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2012.10.19 |
6 |
DC/RF Magnetron Sputter
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2012.10.19 |
5 |
E-beam writer with SEM (JSM-6510)
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2012.10.19 |
4 |
Glove box & Thermal evaporator
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2012.10.19 |
3 |
Mask Alinger(MDA-400M-06)
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2012.10.19 |
» |
P-2 long scan profiler(Alpha step)
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2016.11.08 |
1 |
Rapid Thermal Annealing(RTA)
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2012.10.19 |