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KAIST Institute For NANOCENTURY

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Extra Form
Model TENCOR P-2 long scan profiler(Alpha step)
Specifications - Long scan profiler
- Scan length : max 60 mm
- Max trench depth : 440 μm
- Scan speed : max 100 s
Manager/Contact Kie Young Woo / kywoo9126@kaist.ac.kr / 042-350-7280
Usage fees Internal : 30,000/1hr
External : 50,000/1hr
Others : 50,000/1hr

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List of Articles
번호 제목 날짜
공지 Rules for Cleanroom file 2012.10.19
7 Rapid Thermal Annealing(RTA) file 2012.10.19
» P-2 long scan profiler(Alpha step) file 2016.11.08
5 Mask Alinger(MDA-400M-06) file 2012.10.19
4 Glove box & Thermal evaporator file 2012.10.19
3 E-beam writer with SEM (JSM-6510) file 2012.10.19
2 DC/RF Magnetron Sputter file 2012.10.19
1 DC Pt sputtering and dry etching file 2012.10.19
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