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Instrument

KAIST Institute For NANOCENTURY

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  1. Rules for Cleanroom

    Date2012.10.19
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  2. P-2 long scan profiler(Alpha step)

    Date2016.11.08
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  3. E-beam writer with SEM (JSM-6510)

    Date2012.10.19
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  4. DC Pt sputtering and dry etching

    Date2012.10.19
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  5. Mask Alinger(MDA-400M-06)

    Date2012.10.19
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  6. Glove box & Thermal evaporator

    Date2012.10.19
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  7. DC/RF Magnetron Sputter

    Date2012.10.19
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  8. Rapid Thermal Annealing(RTA)

    Date2012.10.19
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