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KAIST Institute For NANOCENTURY
Model | Glove box & Thermal evaporator |
---|---|
Specifications | - Cryo pump (10-7 torr) - Metal source unit 2ea - Thickness monitor (0.01nm) |
Manager/Contact | Oh, Jae Young / flyup2000@kaist.ac.kr / 042-350-3367 |
Usage fees | Internal : 25,000/1day External : 35,000/1day Others : - |