- INTRODUCTION
- Welcome Address
- Introduction
- Contact US
- PEOPLE
- Professor
- Researcher
- Staff
- RESEARCH HIGHLIGHTS
- Research highlight
- Achievement
KAIST Institute For NANOCENTURY
| Model | DC Pt sputtering and dry etching(self-manufacture) |
|---|---|
| Specifications | Ar dry etching for surface cleaning and platinum deposition |
| Manager/Contact | Lim, Ji Soo /limwakil@kaist.ac.kr / 042-350-2553 |
| Usage fees | - Dry etching Internal : 20,000/20min(standard) + 10,000/10min External : 30,000/20min(standard) + 15,000/10min - Pt deposition Internal : 80,000/100nm(standard) + 20,000/1min External : 120,000/100nm(standard) + 30,000/1min |
E-beam writer with SEM (JSM-6510)
Mask Alinger(MDA-400M-06)