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KAIST Institute For NANOCENTURY
Model | DC Pt sputtering and dry etching(self-manufacture) |
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Specifications | Ar dry etching for surface cleaning and platinum deposition |
Manager/Contact | Lim, Ji Soo /limwakil@kaist.ac.kr / 042-350-2553 |
Usage fees | - Dry etching Internal : 20,000/20min(standard) + 10,000/10min External : 30,000/20min(standard) + 15,000/10min - Pt deposition Internal : 80,000/100nm(standard) + 20,000/1min External : 120,000/100nm(standard) + 30,000/1min |